piezoresistive temperature sensors fabricated by a surface micromachining cmos mems process
作者: cai, chunhua; tan, junyan; hua, di; 等.
scientific reports 卷: 8 文献号: 17065 出版年: nov 20 2018
octagon-shaped 2-d micromachined thermal wind sensor for high-accurate applications
作者: ye, yizhou; yi, zhenxiang; gao, shixuan; 等.
journal of microelectromechanical systems 卷: 27 期: 4 页: 739-747 出版年: aug 2018
a 2d wind sensor using the delta p thermal feedback control
作者: wang, shang; yi, zhenxiang; qin, ming; 等.
journal of microelectromechanical systems 卷: 27 期: 3 页: 377-379 出版年: jun 2018
eight-trigram-inspired mems thermal wind sensor with improved accuracy
作者: ye, yizhou; yi, zhenxiang; qin, ming; 等.
会议: 31st ieee international conference on micro electro mechanical systems (mems) 会议地点: belfast, north ireland 会议日期: jan 21-25, 2018
会议赞助商: ieee
2018 ieee micro electro mechanical systems (mems) 丛书: proceedings ieee micro electro mechanical systems 页: 836-839 出版年: 2018
effect of insulation trenches on micromachined silicon thermal wind sensors
作者: ye, yizhou; yi, zhenxiang; gao, shixuan; 等.
ieee sensors journal 卷: 17 期: 24 页: 8324-8331 出版年: dec 15 2017
modelling and characterization of a robust, low-power and wide-range thermal wind sensor
作者: zhu, yanqing; qin, ming; ye, yizhou; 等.
microsystem technologies-micro-and nanosystems-information storage and processing systems 卷: 23 期: 12 页: 5571-5585 出版年: dec 2017
drie trenches and full-bridges for improving sensitivity of 2-d micromachined silicon thermal wind sensor
作者: ye, yizhou; yi, zhenxiang; gao, shixuan; 等.
journal of microelectromechanical systems 卷: 26 期: 5 页: 1073-1081 出版年: oct 2017
experiment of the mems wind sensor based on temperature-balanced mode
作者: yi, zhenxiang; qin, ming; huang, qing-an
ieee sensors journal 卷: 17 期: 8 页: 2316-2317 出版年: apr 15 2017
drie trenches and full-bridges design for sensitivity improvement of mems silicon thermal wind sensor
作者: ye, yizhou; yi, zhenxiang; qin, ming; 等.
会议: 30th ieee international conference on micro electro mechanical systems (mems) 会议地点: las vegas, nv 会议日期: jan 22-26, 2017
会议赞助商: ieee
30th ieee international conference on micro electro mechanical systems (mems 2017) 丛书: proceedings ieee micro electro mechanical systems 页: 985-988 出版年: 2017
sensitivity improvement of a 2d mems thermal wind sensor for low-power applications
作者: zhu, yanqing; qin, ming; huang, jianqiu; 等.
ieee sensors journal 卷: 16 期: 11 特刊: si 页: 4300-4308 出版年: jun 1 2016
temperature effects on the wind direction measurement of 2d solid thermal wind sensors
作者: chen, bei; zhu, yan-qing; yi, zhenxiang; 等.
sensors 卷: 15 期: 12 页: 29871-29881 出版年: dec 2015
modeling of temperature effects on micromachined silicon thermal wind sensors
作者: huang, qing-an; chen, bei; zhu, yan-qing; 等.
journal of microelectromechanical systems 卷: 24 期: 6 页: 2033-2039 出版年: dec 2015
design and implementation of novel thin film position-sensitive detectors (tfpsds) based on photoconductive effect
作者: zhu, yan-qing; shan, yuan-yuan; qin, ming
microsystem technologies-micro-and nanosystems-information storage and processing systems 卷: 21 期: 9 特刊: si 页: 1975-1986 出版年: sep 2015
development of a self-packaged 2d mems thermal wind sensor for low power applications
作者: zhu, yan-qing; chen, bei; qin, ming; 等.
journal of micromechanics and microengineering 卷: 25 期: 8 文献号: 085011 出版年: aug 2015
